Beilstein J. Nanotechnol.2023,14, 1059–1067, doi:10.3762/bjnano.14.87
In this work, a silicon photodiode integrated with a piezoelectricmembrane is studied by Kelvin probe force microscopy (KPFM) under modulated illumination. Time-dependent KPFM enables simultaneous quantification of the surface photovoltage generated by the photodiode as well as the resulting
mechanical oscillation of the piezoelectricmembrane with vertical atomic resolution in real-time. This technique offers the opportunity to measure concurrently the optoelectronic and mechanical response of the device at the nanoscale. Furthermore, time-dependent atomic force microscopy (AFM) was employed to
spatially map voltage-induced oscillation of various sizes of piezoelectric membranes without the photodiode to investigate their position- and size-dependent displacement.
Keywords: Kelvin probe force microscopy (KPFM); light-driven micro/nano systems; piezoelectricmembrane; surface photovoltage (SPV
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Figure 1:
(a) Schematic illustrating the connection diagram of sideband KPFM measuring the piezo/photodiode d...